A ballscrew drive mechanism
A ballscrew drive mechanism with piezo-electric nut for preload
and motion control
Abstract :
This work reports the development of a ballscrew drive mechanism equipped with a piezo-electric nut for active ballscrew preload and fine motion control. This mechanism is intended for a motion stage of long-stroke, high-speed and ultra-precision applications. Motion of the piezo-electric nut ballscrew drive system consists of a high-speed coarse positioning and an ultra-fine positioning. Coarse positioning is done by a conventional servo motor and ballscrew where the piezo-electric nut exerts a light ballscrew preload in order to reduce the friction torque and wear at high speed motion. After the coarse positioning, a fine position adjustment is actuated by three piezo-electric actuators to get very precise positioning. Test results show that the positioning error can be fine-adjusted to the nanometer level. The low speed stability of the ballscrew drive mechanism has also been improved using the piezo-electric actuators by applying a dither signal to the ballscrew preload. The dither action can smooth and reduce the ballscrew friction force and consequently reduce the stick–slip phenomenon at low speed motion.
Keywords: Ultra-precision positioning; Ballscrew preload control; Piezo-electric actuator
Source : www.sciencedirect.com
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